Etch challenges for chemo-expitaxy Directed Self-Assembly (DSA) LiNe flow in Fin patterning

Chan, BTBTChanSayan, SafakSafakSayanMarzook, TaisirTaisirMarzookAltamirano Sanchez, EfrainEfrainAltamirano SanchezGronheid, RoelRoelGronheidde Marneffe, Jean-FrancoisJean-Francoisde MarneffePiumi, DanieleDanielePiumi2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26416Etch challenges for chemo-expitaxy Directed Self-Assembly (DSA) LiNe flow in Fin patterningMeeting abstract