Donaton, R. A.R. A.DonatonMaex, KarenKarenMaexVantomme, AndreAndreVantommeLangouche, G.G.LangoucheMorciaux, Y.Y.MorciauxSt. Amour, A.A.St. AmourSturm, J. C.J. C.Sturm2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1869Co silicide formation on SiGeC/Si and SiGe/Si layersJournal article