As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliability

Tang, BaojunBaojunTangCroes, KristofKristofCroesBarbarin, YohanYohanBarbarinWang, YunqiYunqiWangDegraeve, RobinRobinDegraeveLi, YunlongYunlongLiToledano Luque, MariaMariaToledano LuqueKauerauf, ThomasThomasKaueraufBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokeiDe Wolf, IngridIngridDe Wolf2021-10-222021-10-2220140026-2714https://imec-publications.be/handle/20.500.12860/24594As-grown donor-like traps in low-k dielectrics and their impact on intrinsic TDDB reliabilityJournal articlehttp://www.sciencedirect.com/science/article/pii/S0026271414002856#