Multi-response optimization of ultrathin Poly-SiGe films characteristics for nano- electromechanical systems (NEMS) using the Grey-Taguchi technique

Asafa, TesleemTesleemAsafaBryce, GeorgeGeorgeBryceSeveri, SimoneSimoneSeveriSaid, SyedSyedSaidWitvrouw, AnnAnnWitvrouw2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20310Multi-response optimization of ultrathin Poly-SiGe films characteristics for nano- electromechanical systems (NEMS) using the Grey-Taguchi techniqueOral presentation