Sprey, HesselHesselSpreySchuhmacher, JorgJorgSchuhmacherTravaly, YoussefYoussefTravalySutcliffe, VictorVictorSutcliffeAbell, ThomasThomasAbellBastings, HansHansBastingsStokhof, MaartenMaartenStokhofHaukka, SuviSuviHaukkaLi, Wei-MinWei-MinLiBeyer, GeraldGeraldBeyerRaaijmakers, IvoIvoRaaijmakers2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9628Opportunities and challenges for integration of ALD barrier layers in damascene process flowsProceedings paper