Okudur, Oguzhan OrkutOguzhan OrkutOkudurVanstreels, KrisKrisVanstreelsZahedmanesh, HoumanHoumanZahedmaneshDe Wolf, IngridIngridDe Wolf2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25700Metrology for evaluating elastic and fracture properties of porous low dielectric constant materialsMeeting abstract