Stolk, PeterPeterStolkMeyssen, VeerleVeerleMeyssenLindsay, RichardRichardLindsayDachs, CharlesCharlesDachsMannino, GiovanniGiovanniManninoCowern, NickNickCowern2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5917Ultrashallow junctions for advanced CMOS technologyProceedings paper