Quantitative assessment of adhesion strength in hybrid bonded interfaces with varying metal contact density

Vanstreels, KrisKrisVanstreelsOkudur, Oguzhan OrkutOguzhan OrkutOkudurGonzalez, MarioMarioGonzalezBeyne, EricEricBeyne2025-08-092025-08-092025-NOV 10167-9317WOS:001539891900001https://imec-publications.be/handle/20.500.12860/46040Quantitative assessment of adhesion strength in hybrid bonded interfaces with varying metal contact densityJournal article10.1016/j.mee.2025.112384WOS:001539891900001