Enhancing dielectric passivation on monolayer WS2 via a sacrificial graphene oxide seeding layer

Wyndaele, Pieter-JanPieter-JanWyndaelede Marneffe, Jean-FrancoisJean-Francoisde MarneffeSergeant, StefanieStefanieSergeantLockhart de la Rosa, Cesar JavierCesar JavierLockhart de la RosaBrems, StevenStevenBremsCaro, A. M.A. M.CaroDe Gendt, StefanStefanDe Gendt2024-04-082024-04-082024-03-272397-7132WOS:001195479100003https://imec-publications.be/handle/20.500.12860/43798Enhancing dielectric passivation on monolayer WS2 via a sacrificial graphene oxide seeding layerJournal article10.1038/s41699-024-00464-xWOS:001195479100003DEPOSITIONINTERFACEHYDROGENATIONOXIDATIONPROGRESSEPOXYXPS