Loo, RogerRogerLooHikavyy, AndriyAndriyHikavyyVincent, BenjaminBenjaminVincentGencarelli, FedericaFedericaGencarelliWitters, LiesbethLiesbethWittersMitard, JeromeJeromeMitardHellings, GeertGeertHellingsSioncke, SonjaSonjaSionckeCaymax, MattyMattyCaymaxBender, HugoHugoBenderSimoen, EddyEddySimoenEneman, GeertGeertEnemanVandervorst, WilfriedWilfriedVandervorstThean, AaronAaronThean2021-10-202021-10-202012-05https://imec-publications.be/handle/20.500.12860/21055Epitaxial growth in advanced MOS devices: challenges and solutionsMeeting abstract