Ohyama, HidenoriHidenoriOhyamaHayama, KiyoteruKiyoteruHayamaVanhellemont, JanJanVanhellemontPoortmans, JefJefPoortmansCaymax, MattyMattyCaymaxTakami, Y.Y.TakamiSunaga, H.H.SunagaNashiyama, I.I.NashiyamaUwatoko, Y.Y.Uwatoko2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1381Degradation of Si1-xGex epitxial devices by proton irradiationJournal article