Progress towards defect-free EUV reticles for NXE:3100

Jonckheere, RikRikJonckheereVan Den Heuvel, DieterDieterVan Den HeuvelHermans, JanJanHermansHendrickx, EricEricHendrickx2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19140Progress towards defect-free EUV reticles for NXE:3100Proceedings paper