Plachetka, U.U.PlachetkaKristensen, A.A.KristensenScheerlinck, StijnStijnScheerlinckWhitbread, N.N.WhitbreadHuskens, J.J.HuskensKoo, N.N.KooKurz, H.H.Kurz2021-10-162021-10-162007-09https://imec-publications.be/handle/20.500.12860/12716Fabrication of photonic components by nanoimprint technology within ePIXnetProceedings paper