Analysis of the early-failure rate prediction of time-dependent dielectric breakdown in thin oxides

Ogier, Jean-LucJean-LucOgierDegraeve, RobinRobinDegraeveRoussel, PhilippePhilippeRousselGroeseneken, GuidoGuidoGroesenekenMaes, HermanHermanMaes2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/793Analysis of the early-failure rate prediction of time-dependent dielectric breakdown in thin oxidesProceedings paper