Side-wall morphology in reactive ion etching of GaN

Karouta, F.F.KaroutaJacobs, B.B.JacobsJacobs, KoenKoenJacobsMoerman, IngridIngridMoerman2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3550Side-wall morphology in reactive ion etching of GaNProceedings paper