Nyns, LauraLauraNynsLisoni, JuditJuditLisoniVan den Bosch, GeertGeertVan den BoschVan Elshocht, SvenSvenVan ElshochtVan Houdt, JanJanVan Houdt2021-10-222021-10-2220141862-6300https://imec-publications.be/handle/20.500.12860/24330Atomic layer deposition of scandium-based oxidesJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201330080/abstract