A novel fully self-aligned SiGe:C HBT architecture featuring a single step epitaxial collector-base process

Donkers, JohanJohanDonkersKramer, MarkMarkKramerVan Huylenbroeck, StefaanStefaanVan HuylenbroeckChoi, Li JenLi JenChoiMeunier-Beillard, PhilippePhilippeMeunier-BeillardBoccardi, GuillaumeGuillaumeBoccardivan Noort, W.W.van NoortHurkx, G.A.M.G.A.M.HurkxVanhoucke, TonyTonyVanhouckeSibaja-Hernandez, ArturoArturoSibaja-HernandezVleugels, FrankFrankVleugelsWinderickx, GillisGillisWinderickxKunnen, EddyEddyKunnenPeeters, StefanStefanPeetersBaute, DebbieDebbieBauteDe Vos, BrechtBrechtDe VosVandeweyer, TomTomVandeweyerLoo, RogerRogerLooVenegas, RafaelRafaelVenegasPijper, R.R.PijperDecoutere, StefaanStefaanDecoutereHijzen, ErwinErwinHijzen2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12087A novel fully self-aligned SiGe:C HBT architecture featuring a single step epitaxial collector-base processProceedings paper