Ultracompact phase modulator based on a cascade of NEMS-operatered slot waveguides fabricated in silicon-on-insulator

Van Acoleyen, KarelKarelVan AcoleyenRoels, JorisJorisRoelsMechet, PaulinePaulineMechetClaes, TomTomClaesVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-202021-10-202012-061943-0655https://imec-publications.be/handle/20.500.12860/21670Ultracompact phase modulator based on a cascade of NEMS-operatered slot waveguides fabricated in silicon-on-insulatorJournal article