Chandra, A.A.ChandraKarra, P.P.KarraBastawros, A.F.A.F.BastawrosBiswas, R.R.BiswasSherman, P J.P J.ShermanArmini, SilviaSilviaArminiLucca, D.A.D.A.Lucca2021-10-172021-10-1720080007-8506https://imec-publications.be/handle/20.500.12860/13494Prediction of scratch generation in chemical mechanical planarizationJournal article