Mastering the art of high mobility material integration on Si: a path towards power-efficient CMOS and functional scaling

Collaert, NadineNadineCollaert2021-10-232021-10-232016-062079-9268https://imec-publications.be/handle/20.500.12860/26467Mastering the art of high mobility material integration on Si: a path towards power-efficient CMOS and functional scalingJournal article10.3390/jlpea6020009http://www.mdpi.com/2079-9268/6/2/9/html