Carrier Profile Determination in Device Structures using AFM-Based Methods

Vandervorst, WilfriedWilfriedVandervorstDe Wolf, PeterPeterDe WolfClarysse, TrudoTrudoClarysseTrenkler, ThomasThomasTrenklerHellemans, L.L.HellemansSnauwaerts, JanJanSnauwaertsRaineri, VitoVitoRaineri2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/966Carrier Profile Determination in Device Structures using AFM-Based MethodsOral presentation