Uruena De Castro, AngelAngelUruena De CastroLerat, Jean-FrançoisJean-FrançoisLeratEmeraud, ThierryThierryEmeraudTous, LoicLoicTousDuerinckx, FilipFilipDuerinckxJohn, JoachimJoachimJohnPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23206Excimer laser annealing for boron implanted local BSF for PERC crystalline silicon solar cellsProceedings paper