Towards Sub-10 nm carrier profiling with spreading resistance techniques

Clarysse, TrudoTrudoClarysseEyben, PierrePierreEybenHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5150Towards Sub-10 nm carrier profiling with spreading resistance techniquesJournal article