Bret, T.T.BretJonckheere, RikRikJonckheereVan Den Heuvel, DieterDieterVan Den HeuvelBaur, C.C.BaurWaiblinger, M.M.WaiblingerBaralia, G.G.Baralia2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20391Closing the gap for EUV mask repairProceedings paper