Influence of thermal anneal steps on the current collapse of Fluorine treated enhancement mode SiN/AlGaN/GaN HEMTs

Lorenz, AnneAnneLorenzDerluyn, JoffJoffDerluynDas, JoJoDasCheng, KaiKaiChengDegroote, StefanStefanDegrooteMedjdoub, FaridFaridMedjdoubGermain, MarianneMarianneGermainBorghs, GustaafGustaafBorghs2021-10-182021-10-1820091610-1634https://imec-publications.be/handle/20.500.12860/15751Influence of thermal anneal steps on the current collapse of Fluorine treated enhancement mode SiN/AlGaN/GaN HEMTsJournal articlehttp://www3.interscience.wiley.com/journal/122254958/abstract