Influence of bufferlayer and processing on the dark current of 2.5µm wavelength, 2% mismatched InGaAs photodetectors

D'Hondt, MarkMarkD'HondtMoerman, IngridIngridMoermanVan Daele, P.P.Van DaeleDemeester, PietPietDemeester2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1212Influence of bufferlayer and processing on the dark current of 2.5µm wavelength, 2% mismatched InGaAs photodetectorsOral presentation