Interaction forces between oxide and silica-modified terpolymer abrasive and their impact on CMP and post-CMP

Armini, SilviaSilviaArminiBurtovyy, RuslanRuslanBurtovyyLuzinov, IgorIgorLuzinovWhelan, CarolineCarolineWhelanMaex, KarenKarenMaexMoinpour, MansourMansourMoinpour2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13310Interaction forces between oxide and silica-modified terpolymer abrasive and their impact on CMP and post-CMPProceedings paperhttp://www.scientific.net/