Sioncke, SonjaSonjaSionckeBrunco, DavidDavidBruncoMeuris, MarcMarcMeurisVan Steenbergen, JanJanVan SteenbergenVrancken, EviEviVranckenHeyns, MarcMarcHeyns2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14485Etching Ge, GaAs and InGaAs: A challenge in semiconductor processingMeeting abstract