Performance enhancement in Ge pMOSFETs with <100> orientation fabricated with a Si compatible process flow

Dutta Gupta, ShubhamShubhamDutta GuptaMitard, JeromeJeromeMitardEneman, GeertGeertEnemanDe Jaeger, BriceBriceDe JaegerMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-10-182021-10-1820100167-9317https://imec-publications.be/handle/20.500.12860/17046Performance enhancement in Ge pMOSFETs with <100> orientation fabricated with a Si compatible process flowJournal article