Influence of the height difference between the first and second nitride layer on erosion and dishing in the dual nitride approach for shallow trench isolation

Heylen, NancyNancyHeylenGrillaert, JoostJoostGrillaertVrancken, EviEviVranckenBadenes, GonçalGonçalBadenesRooyackers, RitaRitaRooyackersMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2632Influence of the height difference between the first and second nitride layer on erosion and dishing in the dual nitride approach for shallow trench isolationProceedings paper