Light-induced capacitance alteration for non-destructive fault isolation in TSV structures for 3-D integration

Jacobs, Kristof J.P.Kristof J.P.JacobsKhaled, AhmadAhmadKhaledStucchi, MicheleMicheleStucchiWang, TengTengWangGonzalez, MarioMarioGonzalezCroes, KristofKristofCroesDe Wolf, IngridIngridDe Wolf2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26772Light-induced capacitance alteration for non-destructive fault isolation in TSV structures for 3-D integrationProceedings paper