Grill, A.A.GrillPatel, V.V.PatelRodbell, K.P.K.P.RodbellHuang, E.E.HuangChristiansen, S.S.ChristiansenBaklanov, MikhaïlMikhaïlBaklanov2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6368Characteristics of low-k and ultralow-k PECVD deposited SiCOH filmsProceedings paper