Ohashi, TakeyoshiTakeyoshiOhashiHasumi, KazuhisaKazuhisaHasumiIkota, MasamiMasamiIkotaLorusso, GianGianLorussoMertens, HansHansMertensHoriguchi, NaotoNaotoHoriguchi2021-10-272021-10-2720191932-5150https://imec-publications.be/handle/20.500.12860/33690Contact inspection and resistance - capacitance measurement of Si nanowire with SEM voltage contrastJournal articlehttps://doi.org/10.1117/1.JMM.18.2.021205