Learning-based defect inspection of µLED patterns using reflection-mode Fourier ptychographic microscopy

Mahmoudpour, SaeedSaeedMahmoudpourSake, BalajiBalajiSakeVelasco, Daniel ArribasDaniel ArribasVelascoSung, MinsikMinsikSungChoi, Jun-KyuJun-KyuChoiSchelkens, PeterPeterSchelkensKim, Hyun-SuHyun-SuKim2026-09-072026-09-0720261559-128Xhttps://imec-publications.be/handle/20.500.12860/60232engLearning-based defect inspection of µLED patterns using reflection-mode Fourier ptychographic microscopyJournal article10.1364/ao.599473WOS:001805281500017CONVOLUTIONAL NEURAL-NETWORKLEDS