Choudhury, SubhobrotoSubhobrotoChoudhuryMannaert, GeertGeertMannaertPetersen Barbosa Lima, LucasLucasPetersen Barbosa LimaDemuynck, StevenStevenDemuynckKoo, Il GyoIl GyoKooLazzarino, FredericFredericLazzarino2025-03-312024-06-062025-03-312024978-1-5106-7222-20277-786XWOS:001223585400003https://imec-publications.be/handle/20.500.12860/43993Patterning spacer source drain cavities in CFET devicesProceedings paper10.1117/12.3013077978-1-5106-7223-9WOS:001223585400003