Oxidation and roughening of silicon during annealing in a rapid thermal processing chamber

Mohadjeri, BabakBabakMohadjeriBaklanov, MikhaïlMikhaïlBaklanovKondoh, EiichiEiichiKondohMaex, KarenKarenMaex2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2773Oxidation and roughening of silicon during annealing in a rapid thermal processing chamberJournal article