Prediction of EUV stochastic microbridge probabilities by lithography simulations

Verduijn, ErikErikVerduijnWelling, UlrichUlrichWellingTang, JiuzhouJiuzhouTangStock, Hans-JurgenHans-JurgenStockKlostermann, UlrichUlrichKlostermannDemmerle, WolfgangWolfgangDemmerleDe Bisschop, PeterPeterDe Bisschop2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/36243Prediction of EUV stochastic microbridge probabilities by lithography simulationsProceedings paperhttps://doi.org/10.1117/12.2552236