Mechanically conscious design of airgaps in nano-interconnects

Zahedmanesh, HoumanHoumanZahedmaneshGonzalez, MarioMarioGonzalezCiofi, IvanIvanCiofiCroes, KristofKristofCroesBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokei2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27648Mechanically conscious design of airgaps in nano-interconnectsMeeting abstract