Ohyama, HidenoriHidenoriOhyamaSimoen, EddyEddySimoenClaeys, CorCorClaeysVanhellemont, JanJanVanhellemontTakami, Y.Y.TakamiSunaga, H.H.SunagaPoortmans, JefJefPoortmansCaymax, MattyMattyCaymax2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2072Lattice defects in Si1-xGex devices by proton irradiation and their effect on device performanceProceedings paper