Self-heating in FinFET and GAA-NW using Si, Ge and III/V channels

Bury, ErikErikBuryKaczer, BenBenKaczerLinten, DimitriDimitriLintenWitters, LiesbethLiesbethWittersMertens, HansHansMertensWaldron, NiamhNiamhWaldronZhou, DaisyDaisyZhouCollaert, NadineNadineCollaertHoriguchi, NaotoNaotoHoriguchiSpessot, AlessioAlessioSpessotGroeseneken, GuidoGuidoGroeseneken2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26385Self-heating in FinFET and GAA-NW using Si, Ge and III/V channelsProceedings paper