Ronse, KurtKurtRonseOp de Beeck, MaaikeMaaikeOp de BeeckYen, AnthonyAnthonyYenKim, Kee - HoKee - HoKimVan den hove, LucLucVan den hove2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1435Characterization and optimization of CD control for 0.25µm CMOS applicationsProceedings paper