Impact of interconnect multiple-patterning variability on SRAMs

Karageorgos, IoannisIoannisKarageorgosDehaene, WimWimDehaeneStucchi, MicheleMicheleStucchiRaghavan, PraveenPraveenRaghavanRyckaert, JulienJulienRyckaertTokei, ZsoltZsoltTokeiVerkest, DiederikDiederikVerkestBaert, RogierRogierBaertSakhare, SushilSushilSakhare2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25455Impact of interconnect multiple-patterning variability on SRAMsProceedings paperhttp://www.date-conference.com/proceedings1/2015/html/0932.html