Scholze, FrankFrankScholzeLaubis, ChristianChristianLaubisPhilipsen, VickyVickyPhilipsenLuong, VuVuLuongEdrisi, ArashArashEdrisivan de Kruijs, RobbertRobbertvan de Kruijs2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27284Evaluation of optical material parameters for advanced absorbers on EUV masksOral presentation