Carbon nanotube pellicles: imaging results of the first full-field extreme ultraviolet exposures

Bekaert, JoostJoostBekaertGallagher, EmilyEmilyGallagherJonckheere, RikRikJonckheereVan Look, LieveLieveVan LookAubert, RemkoRemkoAubertKlein, AlexanderAlexanderKleinYegen, GokayGokayYegenBroman, ParParBromanNair, Vineet VijayakrishnanVineet VijayakrishnanNairTimmermans, MarinaMarinaTimmermansPollentier, IvanIvanPollentierHendrickx, EricEricHendrickx2022-04-282021-11-022022-04-192022-04-282021-05-271932-5150WOS:000670414000007https://imec-publications.be/handle/20.500.12860/37826Carbon nanotube pellicles: imaging results of the first full-field extreme ultraviolet exposuresJournal article10.1117/1.JMM.20.2.021005WOS:000670414000007