Germain, MarianneMarianneGermainDegroote, StefanStefanDegrooteDerluyn, JoffJoffDerluynLeys, MaartenMaartenLeysDas, JoJoDasMotsnyi, VasylVasylMotsnyiVan Hove, MarleenMarleenVan HoveCheng, KaiKaiChengLorenz, AnneAnneLorenzXiao, DongpingDongpingXiaoBorghs, GustaafGustaafBorghs2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12188III-Nitrides electronics at IMEC: latest developments on SiC and large diameter Si substratesProceedings paper