Strain measurements in thin film structures by convergent beam electron diffraction

Armigliato, A.A.ArmigliatoBalboni, R.R.BalboniBenedetti, A.A.BenedettiFrabboni, S.S.FrabboniTixier, A.A.TixierVanhellemont, JanJanVanhellemont2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1698Strain measurements in thin film structures by convergent beam electron diffractionJournal article