Modelling calibration and validation of contributions to stress in the STI process sequence

Garikipati, K.K.GarikipatiRao, V. S.V. S.RaoHao, M. Y.M. Y.HaoIbok, E.E.IbokDe Wolf, IngridIngridDe WolfDutton, R. W.R. W.Dutton2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3462Modelling calibration and validation of contributions to stress in the STI process sequenceProceedings paper