Kesters, ElsElsKestersLe, Quoc ToanQuoc ToanLeBaklanov, MikhaïlMikhaïlBaklanovBoullart, WernerWernerBoullartMertens, PaulPaulMertens2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9121Effect of chemical solution on the stability of low-k filmsOral presentation