Caymax, MattyMattyCaymaxDe Gendt, StefanStefanDe GendtVandervorst, WilfriedWilfriedVandervorstHeyns, MarcMarcHeynsBender, HugoHugoBenderCarter, RichardRichardCarterConard, ThierryThierryConardDegraeve, RobinRobinDegraeveGroeseneken, GuidoGuidoGroesenekenKubicek, StefanStefanKubicekLujan, GuilhermeGuilhermeLujanPantisano, LuigiLuigiPantisanoPetry, JasmineJasminePetryRöhr, ErikaErikaRöhrVan Elshocht, SvenSvenVan ElshochtZhao, ChaoChaoZhaoCartier, EduardEduardCartierChen, JerryJerryChenCosnier, VincentVincentCosnierJang, Se AugSe AugJangKaushik, VidyaVidyaKaushikKerber, AndreasAndreasKerberKluth, JonJonKluthLin, S.S.LinTsai, WilmanWilmanTsaiYoung, EdwardEdwardYoungManabe, Y.Y.Manabe2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6088Issues, achievements and challenges towards integration of high-k dielectricsProceedings paper