Binetti, P.R.A.P.R.A.BinettiLeijtens, X.J.M.X.J.M.LeijtensNikoufard, M.M.Nikoufardde Vries, T.T.de VriesOei, Y.S.Y.S.OeiDi Cioccio, L.L.Di CioccioFedeli, J.-M.J.-M.FedeliLagahe, C.C.LagaheOrobtchouk, R.R.OrobtchoukSeassal, C.C.SeassalVan Campenhout, J.J.Van CampenhoutVan Thourhout, DriesDriesVan ThourhoutVan Veldhoven, P.J.P.J.Van VeldhovenNötzel, R.R.NötzelSmit, M.K.M.K.Smit2021-10-162021-10-162007-09https://imec-publications.be/handle/20.500.12860/11750InP-based membrane photodetectors for optical interconnects to SiProceedings paper